X-Y stage

Posted on March 01, 1999

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X-Y stage

The MAS-300 compact X-Y stage from New England Affiliated Technologies (Lawrence, MA) is designed for 300-mm wafer positioning, as well as other applications requiring scanning and inspection. The system reaches velocities up to 500 mm/s at submicron resolution. Total work envelope is less than 28 x 24-in., and all moving cables are completely enclosed.

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